对静电驱动柔性振膜的吸合特性进行了理论分析和实验观测。通过理论计算得到了静电驱动下柔性振膜与具有连续曲面的腔体实现完全吸合的吸合电压。完全吸合电压随振膜电极与腔体直径的偏差以及振膜初始应力的增大而增大。同时,通过实验验证了静电驱动下柔性振膜的电极与具有连续曲面的腔体在驱动电压100 V、驱动频率2.5 Hz的条件下能够实现完全吸合。振膜电极与腔体直径的偏差会导致振膜所受静电力以及二者之间的电容能均呈现出明显的不均匀性,因此二者的完全吸合过程呈现出显著的非中心对称特性。 The theoretical analysis and experimental observation of the pull-in characteristics of electrostatic driven flexible diaphragm were carried out. Through the theoretical calculation, the electrostatic pull-in voltage of the flexible diaphragm and the cavity with continuous curved surface is achieved. The voltage of the complete pull-in increases with the deviation of the diameter of the diaphragm electrode from the cavity and the increase of the initial stress of the diaphragm. At the same time, it is verified by experiment that the electrode of the flexible diaphragm and the cavity with the continuous curved surface under the electrostatic drive can achieve the full pull-in under the driving voltage of 100 V and the driving frequency of 2.5 Hz. The deviation of the diameter of the diaphragm electrode from the cavity leads to the electrostatic force on the diaphragm and the apparent heterogeneity of the capacitance between the diaphragm electrode and the electrode. Therefore, the complete pull-in process of the two electrodes presents significant non-centrosymmetric characteristics .