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针对红外成像系统常用光机扫描器的不足,提出了没有机械运动部件的全固态电光扫描器设计方法,给出了几种透射式固态电光扫描器结构,主要包括扫描列阵、耦合波导和控制电路三个部分。工作原理是:通过控制电路顺序控制各扫描单元光信号的传输,再通过耦合波导将光信号耦合到探测器上实现扫描成像。扫描列阵将完整图像分割成图像单元,耦合波导将空间位置不同的图像单元耦合到红外焦平面探测器上,控制电路用来控制扫描列阵各图像单元的工作状态。这种扫描器体积小、重量轻、结构紧凑,采用与红外焦平面探测器制作工艺相似的半导体制作工艺,具有与探测器集成的技术基础,控制起来更加方便。
Aiming at the deficiency of common optical scanner in infrared imaging system, a design method of all solid state electro-optic scanner without mechanical moving parts is proposed. Several kinds of transmissive solid-state electro-optical scanner structures are given, including scanning array, coupled waveguide and control Circuit three parts. The working principle is: the control circuit sequentially controls the optical signal transmission of each scanning unit, and then the optical signal is coupled to the detector through the coupling waveguide to realize the scanning imaging. The scanning array divides the complete image into image units. The coupling waveguide couples the image units with different spatial positions to the infrared focal plane detector. The control circuit is used to control the working status of each image unit of the scanning array. The scanner is small in size, light in weight and compact in structure. It adopts a semiconductor manufacturing process similar to the infrared focal plane detector manufacturing process, and has the technical foundation integrated with the detector and is more convenient to control.