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IntroductionIn recent years, the utilization of silicon micromachining techniques to produce new types of chemical sensors has been suggested [1. 2]. These techniques permit the formation of three dimensional microstructures and other desirable features, and will havc a significant and revolutionary impact in future chemical sensor development.
IntroductionIn recent years, the utilization of silicon micromachining techniques to produce new types of chemical sensors has been suggested [1.2]. These techniques permit the formation of three dimensional microstructures and other desirable features, and will havc a significant and revolutionary impact in future chemical sensor development.