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本文讨论了声表面波单片式ZnO/SiO_2/Si声电卷积器/相关器的原理与设计。它是利用压电体的自由表面相反传播的声表面波的非线性互作用,还利用半导体中的载流子与声场互作用获得其复杂的卷积/相关信号。本文介绍的是一种在半导体(n-Si)表面上沉积一层压电膜(ZnO)的层状结构的固态器件。其特点是量轻、低工作电压、低的伪信号电平和温度系数,实测卷积器/相关器的性能为f_0=60MHz,带宽为3.8MHz,卷积效率为F_(T_0)=-63～-65dBm,相关时间为T=4.5μS、动态范围大于40dB。最小输入功率小于1dBm。
This article discusses the principle and design of a monolithic ZnO / SiO_2 / Si Acoustic Epiator / correlator for surface acoustic wave. It takes advantage of the non-linear interaction of surface acoustic waves propagating in the opposite direction of the free surface of the piezoelectric body and also uses the carrier-sound interaction in the semiconductor to obtain its complex convolution / correlation signal. This article presents a solid-state device with a layered structure of a piezoelectric film (ZnO) deposited on a semiconductor (n-Si) surface. It is characterized by light weight, low operating voltage, low false signal level and temperature coefficient. The measured performance of the convolver / correlator is f_0 = 60MHz, the bandwidth is 3.8MHz and the convolution efficiency is F_ (T_0) = -63 ~ -65dBm, related time T = 4.5μS, dynamic range greater than 40dB. The minimum input power is less than 1dBm.