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简要描述了新开发的准分子激光微加工装备的结构特点 .系统地研究了准分子激光直刻高分子聚合物的机制及其与微结构制作精度的关系 .并以PVC微结构原型及其复制件的制作为例 ,讨论了准分子激光投影直刻用于LIGA工艺的可行性 .研究表明准分子激光投影直刻微加工技术可用于制作微机械 .
The structural characteristics of the newly developed excimer laser micromachining equipment are briefly described.The mechanism of laser excimer laser direct imprinting polymer and its relationship with the microstructure fabrication precision are systematically studied.According to the prototype of PVC microstructure and its replication As an example, the feasibility of excimer laser direct projection lithography for the LIGA process was discussed, and the results show that the LM laser direct projection micromachining technology can be used to make micromachines.