一、引言 钛扩散铌酸锂光波导在目前的集成光学无源器件中占主导地位,人们已对它作了许多研究,并用它做成了器件,有的已实用化。但是,严重影响钛扩散铌酸锂光波导质量的外扩散的研究及其抑制方法还未成熟。早期用铌酸锂粉或碳酸锂粉来抑制外扩散,后来水气抑制外扩散法为大多数研究者使用。近年来认为水气不能在长时间内抑制外扩散,只能使外扩散 I. INTRODUCTION Titanium-diffused LiNbO3 optical waveguides dominate the current integrated optical passive devices. Many people have done a lot of research on it and used it as a device. Some have been put into practical use. However, the research on the external diffusion and its suppression methods, which seriously affect the quality of the optical waveguide of titanium-doped lithium niobate, have not yet been developed. The early use of lithium niobate powder or lithium carbonate powder to inhibit the spread, and later suppressed moisture diffusion method for most researchers. In recent years that water vapor can not inhibit the spread of a long time, only to spread outside