论文部分内容阅读
利用Ar~+束溅射沉积技术在HgCdTe表面低温生长了 CdTe介质薄膜.分别用 CdTe介质膜和 HgCdTe自身阳极氧化膜对 HgCdTe表面钝化.利用光电导衰退信号波形的拟合,得到了不同表面钝化的HgCdTe非平衡载流子表面复合速度结果表明,CdTe/HgCdTe界面质量已超过自身阳极氧化膜/HgCdTe界面质量
CdTe thin films were grown on the surface of HgCdTe by Ar ~ + beam sputtering deposition. The surface of HgCdTe was passivated with CdTe dielectric film and HgCdTe self-anodic oxide film respectively. The results show that the interface quality of CdTe / HgCdTe interface has exceeded the interface quality of the anodic oxide film / HgCdTe with the surface passivation of HgCdTe with different surface passivation.