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介绍一种以8031单片机为核心,采用电容传感器对薄膜厚度进行动态在线测量的高精度高分辨率仪器。仪器采用反馈运算方法,使用驱动电缆技术,克服了电容传感器输出的非线性,并提高了仪器整机的抗干扰能力。测量结果在单片机系统的控制下,实时进行数显,同时将被测过程量的变化情况通过TV板变成视频信号送入视频显示器,直观反映出测量结果的变化趋势。
This paper introduces a kind of high precision and high resolution instrument which uses 8031 single chip microcomputer as its core and uses capacitance sensor to measure the film thickness dynamically and online. The instrument uses feedback computing method, using drive cable technology to overcome the non-linearity of capacitive sensor output and improve the anti-interference ability of the whole instrument. The measurement results under the control of the single-chip microcomputer system, real-time digital display, at the same time changes in the measured process volume through the TV board into a video signal into the video display, intuitively reflect the changing trend of measurement results.