计算机控制变转速立式液相外延炉张颖，欧阳嘉，朱成德，何华辉（华中理工大学固体电子学系）０引言液相外延（ＬＰＥ）是生长单晶钇铁石榴石（ＹＩＧ）薄膜的一个重要方法。ＹＩＧ薄膜在静磁波、磁泡、传感器及磁光等领域应用广泛。近年来，随着光通信的发展，掺钮钇铁石... Computer controlled variable speed vertical liquid phase epitaxy furnace Zhang Ying, Ouyang Jia, Zhu Chengde, He Huaihui (Department of Solid State Electronics, Huazhong University of Science and Technology) 0 Introduction Liquid phase epitaxy (LPE) is a growth of single crystal yttrium iron garnet (YIG) Important method. YIG thin film is widely used in fields of magnetostatic wave, bubble, sensor and magneto-optical. In recent years, with the development of optical communications, doped yttrium ...