多孔硅微细加工的压阻压力传感器 微型压力传感器是在60年代末出现的,微细加工技术就是从此开始发展的。上面所述的各向异性化学腐蚀、电化学腐蚀和硅片直接融结等都已用来制造微型压阻压力传感器。微型压阻压力传感器尚需解决的问题是制造工艺太复杂、生产成本太高以及不易制造高灵敏的微压传感器等。针对这种情况,本文 Porous silicon micro-processing of piezoresistive pressure sensor Micro-pressure sensor appeared in the late 60s, micro-processing technology is from the beginning of development. The above-mentioned anisotropic chemical etching, electrochemical corrosion and direct silicon wafer fusion have been used to manufacture miniature piezoresistive pressure sensors. Micro piezoresistive pressure sensor still need to solve the problem is too complicated manufacturing process, the production cost is too high and not easy to create highly sensitive micro-pressure sensors. In view of this situation, this article