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介绍了φ500制冷机低温泵的系统组成及其结构设计的特点。着重叙述了泵的性能测试方法,并通过实验测试了其主要性能指标。泵的工作压力范围为10~(-1)～10~(-7)Pa,对各种气体均有较大的抽速,并具有操作使用方便、性能稳定可靠、系统清洁无油等优点。
The system constitution of φ500 refrigerator cryogenic pump and its structural design are introduced. Emphatically describes the pump performance testing methods, and tested by its main performance indicators. Pump working pressure range of 10 ~ (-1) ~ 10 ~ (-7) Pa, for a variety of gases have a larger pumping speed, and has convenient operation, stable and reliable performance, the system clean and oil-free and so on.