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介绍三种可用于三维成像的电容传感器结构 ,利用三维有限元软件仿真分析不同结构传感器的灵敏场特性 ,最后给出三种结构传感器的成像结果及相应的空间图像误差
Three capacitive sensor structures that can be used for three-dimensional imaging are introduced. The three-dimensional finite element software is used to simulate and analyze the sensitive field characteristics of different structural sensors. Finally, the imaging results of the three kinds of structural sensors and the corresponding spatial image errors