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数字相关滤波精密检测是随着现代光电子技术、计算机技术的进步而发展起来的一门新兴技术，在现代制造业，尤其是在超大规模集成电路制造等领域中的非接触高精密测量方面具有重要的实用价值。本文通过实例，探讨了在非接触式精密位置检测与控制系统中的应用原理及实现方法
Precise detection of digital correlation filtering is an emerging technology developed with the advancement of modern optoelectronic technology and computer technology. It is of great importance in the non-contact high-precision measurement in the field of modern manufacturing industry, especially in the field of VLSI manufacturing. The practical value. This article through the example, discussed in non-contact precision position detection and control system application principle and realization method