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20世纪50年代初期,美国首先利用电磁感应原理开发了用于经纬仪及导弹制导设备上的旋转式感应同步器以及直线式感应同步器,不久,这些技术即转入民用。接着,英国及捷克也分别将光栅及磁栅技术应用到位移测量领域,如英国Renishaw目前研制的开放式非接触钢带光栅,即使标尺不慎划伤,其精度也不受影响,可适用于一般车间环境。随即出现了感应同步器、光栅、磁栅三大类型数显产品全面推广、普及应用的旺盛时期。发展到今天,性能最高,应用最普遍、销售量最大的是光栅位移传感器,在数显装置的国际市场占有率已超过80%,并且在数控机床的应用上已占据主要的地位(见第50页图1所示)。在数控机床及其他装备机械领域,数显检测已广泛用于检测伺服控制装置内测量执行机构的位置或伺
In the early 1950s, the United States first developed rotary induction synchronizers and linear induction synchronizers for use in theodolite and missile guidance equipment using the principle of electromagnetic induction. In the near future, these technologies were transferred to civilian use. Then, the United Kingdom and the Czech Republic also applied the grating and the magnetic grid technology respectively to the field of displacement measurement. For example, the open non-contact steel grating currently developed by Renishaw in the UK has no influence on the precision even if the scale is scratched inadvertently. General workshop environment. Then there are induction synchronizers, gratings, magnetic grid three types of digital products to promote the popularity of the application of the strong period. Developed today, the highest performance, the most widely used, the largest sales of the grating displacement sensor, the digital display device in the international market share of more than 80%, and in the application of CNC machine tools has occupied a major position (see 50 Page 1). In the field of CNC machine tools and other equipment, digital detection has been widely used to detect the position of the servo actuator or measuring actuator