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双金属效应是一种基本的物理效应，这一效应在硅微机械装置上的应用，有力地弥补了硅材料不具备压电效应，电信号难以直接转换为机械驱动力的缺陷。本文将介绍我们研制的铝硅双金属膜片．膜片尺寸为4mm×4mm×（20μm单晶硅＋10μm金属铝）．实验和分析结果表明，铝硅双金属膜片具有优越的力学特性，能提供足够大的动力和位移。这种集成的单片驱动结构不仅在材料及工艺上与IC工艺完全兼容，而且通过调整有关结构参数及工艺参数，可使该结构在5伏电压下稳定工作，为实现硅微机械系统（MEMS）奠定了基础．这种驱动方式是目前制造微阀门、微流量泵等需要大动力、大位移的硅微机械及其系统的理想驱动结构．
The bimetallic effect is a basic physical effect. The application of this effect on the silicon micromechanical device effectively compensates for the defect that the silicon material does not have the piezoelectric effect and the electrical signal can not be directly converted into the mechanical driving force. This article will introduce the aluminum-silicon bimetallic diaphragm that we developed. The diaphragm size is 4 mm × 4 mm × (20 μm monocrystalline + 10 μm metallic aluminum). Experimental and analytical results show that aluminum-silicon bimetallic diaphragm has superior mechanical properties, can provide sufficient power and displacement. This integrated monolithic driver structure is not only fully compatible with IC technology in material and process, but also can be stably operated under a voltage of 5 volts by adjusting relevant structural parameters and process parameters. In order to realize the MEMS of MEMS (MEMS )Foundation. This kind of driving mode is the ideal driving structure of micro-valves and micro-flow pumps that need large power and large displacement at present, and their systems.