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发展了两种典型的测量光从有一定粗糙度的光学表面散射后的空间光强分布的装置,探讨了它们的优点和局限性,并研究了这两种系统的横向和纵向分辨率。结果表明,利用步进电机的扫描测量系统适用于在实验室中作高精度的表面粗糙度测量,而利用CCD阵列的测量系统适用于在光学制造中的在线检测。
Two typical devices for measuring the spatial light intensity distribution of light scattered from an optical surface with a certain roughness are developed. Their advantages and limitations are discussed. The horizontal and vertical resolution of the two systems are also studied. The results show that the scanning measurement system using stepper motor is suitable for high-precision surface roughness measurement in the laboratory, while the measurement system using CCD array is suitable for on-line detection in optical manufacturing.