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采用溶胶-凝胶法制备了SnO2氢敏纳米薄膜。将0.1和0.05mol/L的SnO2溶胶溶液旋涂在Au叉指电极衬底而制得。通过测量在不同温度下SnO2纳米氢敏薄膜的电阻信号来表征其氢敏特性。当温度为250℃时,试样的灵敏度较低,并且响应时间也比较长。温度为300℃时试样的灵敏度较高,响应时间也明显缩短。0.05mol/L溶胶溶液旋涂10层制备的样品在300℃氢气浓度为2.0×10-3时,灵敏度达到了178,响应时间为3.5s。同时实验还发现试样对氢气的响应时间随着氢气浓度的增加先增大再减小。
SnO2 hydrogen sensitive nano-films were prepared by sol-gel method. 0.1 and 0.05 mol / L of SnO2 sol solution is spin-coated on the Au interdigital electrode substrate. The hydrogen sensitive properties of SnO2 nanosensitive thin films were characterized by measuring the resistance of SnO2 nanosensitive thin films at different temperatures. When the temperature is 250 ℃, the sensitivity of the sample is lower and the response time is longer. When the temperature is 300 ℃, the sensitivity of the sample is high, and the response time is obviously shortened. 0.05mol / L sol solution spin-coated 10 samples prepared at 300 ℃ hydrogen concentration of 2.0 × 10-3, the sensitivity reached 178, the response time of 3.5s. At the same time, the experiment also found that the response time of hydrogen to sample increases and then decreases with the increase of hydrogen concentration.