将“高分辨二次电子成分衬度成像原理”与“离子束锥形刻蚀处理样品的方法”相结合，利用高分辨场发射扫描电镜对室温下离子束辅助沉积制备的氮化硅／氮化钛陶瓷多层膜层厚及其纳米组织结构进行观察研究，清晰地观察到各层层厚及各层中的纳米粒子，这一方法为氮化硅／氮化钛陶瓷多层膜纳米结构与层间关系的研究提供了一种实用而有效的手段。 Combining the principle of contrast imaging of secondary electrons with high resolution and the method of ion beam cone etching to treat samples, the high-resolution field emission scanning electron microscope (SEM) was used to simulate the deposition of silicon nitride / nitrogen Titania ceramic multilayer film thickness and its nano-structure were observed and observed clearly to each layer thickness and layers of nanoparticles, the method for the silicon nitride / titanium nitride ceramic multilayer nanostructures The study of the relationship with the layer provides a practical and effective means.