针对一种特殊形状的超声波电容传感器单元的结构特点,采取适当的保角变换方法,通过多次变换将特殊形状的电容传感器的静电场区域变换到容易求解的区域,并相应地求解出传感器传感单元的静电容、场强分布和极板电荷密度等相关量,为提高传感器传感精度的设计奠定基础。 Aiming at the structural characteristics of a special shaped ultrasonic capacitance sensor unit, the appropriate conformal transformation method is adopted to transform the electrostatic field region of a special shape capacitive sensor into an easily solvable region through multiple transformations, and the sensor transmission The electrostatic capacity, the distribution of the field strength and the charge density of the electrode plate of the sensing unit lay the foundation for the design of improving the sensing accuracy of the sensor.