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[会议论文] 作者:Q.Li,C.Shan,Q.Yang,F.Chen,H.Bian,X.Hou,
来源:2016年第二届光子学与光学工程国际会议暨第八届西部光子学会议 年份:2016
This paper demonstrates a noval electro-thermal micro actuator design,fabrication and device tests that combines microfluidic technology and microsolidics process.A three-dimensional solenoid microcha...
Fabrication of 3D solenoid microcoils in silica glass by femtoseconc laser wet etch and microsolidic
[会议论文] 作者:X.Meng,F.Chen,Q.Yang,C.Shan,K.Liu,Y.Li,H.Bian,G.Du,X.Hou,
来源:2014年光子与光学工程国际会议暨西部光子学学术会议 年份:2014
This paper reports a flexible fabrication method for 3D solenoid microcoils in silica glass.The method consists of femtosecond laser wet etching(FLWE)and mi...
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