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[期刊论文] 作者:Wang Yong-Qian(王永谦),Liao Xian-Bo(廖显伯),Diao Hong-Wei(刁宏伟),Zhang Shi-Bin(张世斌),Xu Yan-Yue(徐艳月),Chen Chang-Yong, 来源:中国物理(英文版) 年份:2002
A novel pulsed rapid thermal processing (PRTP) method has been used for realizing solid-phase crystallizationof amorphous silicon films prepared by plasma-enhan...
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