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[期刊论文] 作者:Qi Le-Jun,Ling Li,Li Wei-Qing,Yang Xin-Ju,Gu Chang-Xin,Lu Ming,
来源:中国物理(英文版) 年份:2005
Si(110) surface morphology evolution under normal-incident Ar+ ion sputtering has been studied as a function of Si temperature with the ion energy of 1.5keV and...
[期刊论文] 作者:LI Wei-Qing,LING Li,QI Le-Jun,YANG Xin-Ju,FAN Wen-Bin,GU Chang-Xin,LU Ming,
来源:中国物理快报(英文版) 年份:2005
Nanodot arrays were formed on Si(110) surface under normal-incident Ar+ ion sputtering at substrate temperature of 800 ℃.Theion flux was 20μA/cm2, and the ion...
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