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Investigation on the Control of Silicon Whisker Generation during Dichlorosilane-Based WSi Depositio
[会议论文] 作者：Myeonghun Oh,Jinsung Kim,Jaungoo Kim,Ji Chul Yang,Soochul Lee,Hoomi Ch,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Semiconductor industry faces a continuous challenge to increase the production yield by eliminating defect sources.The majority of the defect is caused by synthesized nano-materials in the process cha...
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