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[会议论文] 作者:Sang-Jin Cho,Aiping Zeng,Jin-Hyo Boo, 来源:The 8th Asian-European International Conference on Plasma Su 年份:2011
[会议论文] 作者:Sang-Jin Cho,Chunyan Jin,Jin-hyo Boo, 来源:2011年第三届微电子及等离子体技术国际会议 年份:2011
The nitrogen doped thiophene plasma polymer (ThioPP) was deposited on silicon(100) substrate by plasma enhanced chemical vapor deposition (PECVD) method as a function of nitrogen flow rate....
[会议论文] 作者:Aiping Zeng,Chunyan Jin,Sang-Jin Cho,Sang-Hun Nam,Jin-Hyo Boo, 来源:The 8th Asian-European International Conference on Plasma Su 年份:2011
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