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Structures and tribological performances of ultrathin diamond-like carbon films prepared by plasma-b
[会议论文] 作者：Liao Jia-xuan,Li En-qiu,Tian Zhong,Pan Xiao-feng,Xu Jiang,Jin Long,Yang Hai-guang,
来源：电子科技大学电子科学技术研究院第三届学术交流会 年份：2007
Ultrathin diamond-like carbon (DLC) films with thickness of 5-60nm have been prepared on Si by plasma-based ion implantation (PBⅡ).Raman sPectrum and X-ray photoelectron spectroscopy (XPS) show that t...
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