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The plasma gas reaction factors influencing the deposition of TiO2 nanocrystallines film by atmosphe
[会议论文] 作者：Linjun Dai,Yu Xu,A.A Siddig Eshrag,Maoshui Wu,Jianjun Shi,Jing Zhang,
来源：13th Asia-Pacific Conference on Plasma Science and Technolog 年份：2016
In this paper,we use atmospheric radio frequency (rf) plasma chemical vapor to prepare TiO2 nanocrystalline film and to study the plasma gas reaction factors influencing the film structure....
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