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[会议论文] 作者：Masaharu Shiratani,Kazunori Koga,Giichiro Uchida,
来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
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[会议论文] 作者：Takeaki Matsunaga,Masaharu Shiratani,Yeon-Won Kim,Kazunori Koga,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Hydrogenated microcrystalline silicon (c-Si∶H) films,which are widely employed for thin films silicon tandem solar cells,are commonly deposited by plasma chemical vapor deposition (CVD)....
Development of Density-Inclination Plasmas for Analysis of Plasma Nano-Processes via Combinatorial M
[会议论文] 作者：Yuichi Setsuhara,Kosuke Takenaka,Masaharu Shiratani,Makoto Sekine,Masaru Hori,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
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Development of Density-Inclination Plasmas for Analysis of Plasma Nano-Processes via Combinatorial M
[会议论文] 作者：Yuichi Setsuhara,Kosuke Takenaka,Masaharu Shiratani,Makoto Sekine,Masaru Hori,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
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Plasma Interaction with Zn Nano Layer on Organic Materials for Analysis of Early Stage of Inorganic/
[会议论文] 作者：Ken Cho,Kosuke Takenaka,Yuichi Setsuhara,Masaharu Shiratani,Makoto Sekine,Masaru Hori,
来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
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Plasma Interaction with Zn Nano Layer on Organic Materials for Analysis of Early Stage of Inorganic/
[会议论文] 作者：Ken Cho,Kosuke Takenaka,Yuichi Setsuhara,Masaharu Shiratani,Makoto Sekine,Masaru Hori,
来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
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Effects of Si Nano-Particle Incorporation on Properties of Microcrystalline Silicon Thin Films Studi
[会议论文] 作者：Takeaki Matsunaga,Daisuke Yamashita,Kunihiro Kamataki,Naho Itagaki,Giichiro Uchida,Kazunori Koga,Masaharu Shiratani,
来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
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Effects of Flux of Carbon Radicals on Anisotropic Deposition of Carbon Films on Fine Trench Using H-
[会议论文] 作者：Tatsuya Urakawa,Hidehumi Matsuzaki,Daisuke Yamashita,Giichiro Uchida,Kazunori Koga,Masaharu Shiratani,
来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
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Effects of Flux of Carbon Radicals on Anisotropic Deposition of Carbon Films on Fine Trench Using H-
[会议论文] 作者：Tatsuya Urakawa,Hidehumi Matsuzaki,Daisuke Yamashita,Giichiro Uchida,Kazunori Koga,Masaharu Shiratani,
来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
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[会议论文] 作者：Setsuhara,Kosuke Takenaka,Osamu Nakatsuka,Shigeaki Zaima,Hiroaki Kondo,Ken Cho,Akinori Ebe,Masaharu Shiratani,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
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[会议论文] 作者：Yuichi Setsuhara,Osamu Nakatsuka,Shigeaki Zaima,Kosuke Takenaka,Ken Cho,Akinori Ebe,Masaharu Shiratani,
来源：9th Asia-Pacific Conference on Plasma Science and Technology 年份：2008
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