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Impact of the conditions on the electrostatic oscillations in unbalanced magnetron sputtering plasma
[会议论文] 作者：MU Zong-Xin,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Unbalanced magnetron sputtering technique has been extensively used in the area of material sputtering and deposition.The magnetron sputter discharge produces complicated electrostatic oscillations in...
[期刊论文] 作者：Zhao Hua-Yu,Mu Zong-Xin,
来源：中国物理B（英文版） 年份：2008
In this paper a numerical simulation of a planar DC magnetron discharge is performed with the Particle-inCell/Monte Carlo Collision (PIC/MCC) method. The magnet...
[期刊论文] 作者：LIU Cui,LI Guo-Qing,GOU Wei,MU Zong-Xin,ZHANG Cheng-Wu,
来源：中国物理快报（英文版） 年份：2004
Smooth, dense and uniform diamond-like carbon films (DLC films) for industrial applications have successfully been prepared by dual-target unbalanced magnetron...
[会议论文] 作者：Zang Hai-Rong,Mu Zong-Xin,Wang Chun,Mu Xiao-Dong,Liu Bing-Bing,Dong Chuang,
来源：The 11th International Workshop on Plasma-Based Ion Implanta 年份：2011
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[会议论文] 作者：Zang Hai-Rong,Mu Zong-Xin,Wang Chun,Mu Xiao-Dong,Liu Bing-Bing,Dong Chuang,
来源：The 11th International Workshop on Plasma-Based Ion Implanta 年份：2011
...
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