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SINGULAR: Multi Chamber ICP-PECVD Production Tools for Advanced Passivation and Heterojunction Layer
[会议论文] 作者：M.R.HUBER,T.DIPPELL,P.WOHLFART,J.GE,T.MUELLER,
来源：SNEC 第七届(2013)国际太阳能产业及光伏工程(上海)论坛 年份：2013
SINGULAR is a multi chamber PECVD production tool,which allows to deposit mono or multi layers of different material on silicon solar wafers using an inductively coupled plasma (ICP).Every deposition...
[期刊论文] 作者：D．Verhaart,T．Jakob,M．Huber,P．Wohlfart,宋琼,,
来源：记录媒体技术 年份：2004
DVDR光盘生产正从技术要求和产量两方面进入第二个发展阶段。先进的生产系统和对所有工艺参数的充分理解,快速的技术转移和具备最新压模、染料和驱动器,都是在这个有诱惑力的...
Heterojunction Solar Cell Production:Wet Chemical Processing and Contact Formation by Physical Vapor
[会议论文] 作者：Marco R.Huber,B.Mandlmeier,M.Corda,M.Weser,M.Hoffmann,P.Wohlfart,
来源：SNEC 第十届(2016)国际太阳能产业及光伏工程(上海)论坛 年份：2016
We present data on two decisive process steps within the heterojunction silicon solar cell production flow:Wet chemical processing and physical vapor deposition (PVD) of transparent conductive oxide (...
SINGULAR: Multi Chamber ICP-PECVD Production Tools for Advanced Passivation and Heterojunction Layer
[会议论文] 作者：M.R.HUBER[1]T.DIPPELL[1]P.WOHLFART[1]J.GE[2]T.MUELLER[2],
来源：SNEC 第七届(2013)国际太阳能产业及光伏工程(上海)论坛 年份：2013
SINGULAR is a multi chamber PECVD production tool,which allows to deposit mono or multi layers of different material on silicon solar wafers using an induct...
Commercial Production of Cigsse Modules with PVD Sputtering and with A Hybrid Based Selenization and
[会议论文] 作者：BEISENHERZ,V.ALBERTS,E.SCHOLTZ,J.OLIVIER,G.BONTHUYS,S.van den HEEVER,H.ARENDSE,M.ROUX,B.CORD,J.RICHTER,P.WOHLFART,
来源：SNEC 第八届(2014)国际太阳能产业及光伏工程(上海)论坛 年份：2014
CIGS modules are currently produced on mass production level and have the potential to reach high conversion efficiencies around 15%.The production cost of CIS-based modules varies significantly among...
Commercial Production of Cigsse Modules with PVD Sputtering and with A Hybrid Based Selenization and
[会议论文] 作者：E.SCHOLTZ[1]J.OLIVIER[1]G.BONTHUYS[1]S.vandenHEEVER[1]H.ARENDSE[1]M.ROUX[1]B.CORD[2]J.RICHTER[2]P.WOHLFART,
来源：SNEC 第八届(2014)国际太阳能产业及光伏工程(上海)论坛 年份：2014
CIGS modules are currently produced on mass production level and have the potential to reach high conversion efficiencies around 15%.The production cost of...
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