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In-situ Monitoring of the Influence of Inert Gases (Ne,Ar,Kr,Xe) on Plasma Properties and the Growth
[会议论文] 作者：Michal Novotny,Jiri Bulir,Jan Lancok,Petr Pokorny,Ladislav Fekete,Jindrich Musil,Katerina Piksova,
来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
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In-situ Monitoring of the Influence of Inert Gases (Ne,Ar,Kr,Xe) on Plasma Properties and the Growth
[会议论文] 作者：Michal Novotny,Jiri Bulir,Jan Lancok,Petr Pokorny,Katerina Piksova,Ladislav Fekete,Jindrich Musil,
来源：The 8th Asian-European International Conference on Plasma Su 年份：2011
...
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