搜索筛选:
搜索耗时3.6023秒,为你在为你在102,285,761篇论文里面共找到 1 篇相符的论文内容
发布年度:
[会议论文] 作者:J-H Lee,S-C Yang,
来源:2011年第三届微电子及等离子体技术国际会议 年份:2011
The negatively charged nanoparticles are generated for prepare the silicon thin films in the SH4 plasma.It has been recognized that the nanoparticles contamination is a major problem in plasma process...
相关搜索: