An analysis of E×B drift movement in the SH4 plasmas included negatively charged nanoparticles

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:huangyi101
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The negatively charged nanoparticles are generated for prepare the silicon thin films in the SH4 plasma.It has been recognized that the nanoparticles contamination is a major problem in plasma processing such as etching,sputtering and chemical vapor deposition applications of silicon thin film.
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