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[会议论文] 作者:J.B.Lee,S.H.Seo,H.Y.Chang,
来源:9th Asia-Pacific Conference on Plasma Science and Technology 年份:2008
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Characterization of Pulsed Argon, Nitrogen, and Oxygen Plasmas in 450 mm Large-Area Inductive Discha
[会议论文] 作者:S.H.Seo,J.B.Lee,J.M.Yoon,H.Y.Chang,
来源:9th Asia-Pacific Conference on Plasma Science and Technology 年份:2008
...
Characterization of Pulsed Argon, Nitrogen, and Oxygen Plasmas in 450 mm Large-Area Inductive Discha
[会议论文] 作者:S.H.Seo,J.B.Lee,J.M.Yoon,H.Y.Chang,
来源:9th Asia-Pacific Conference on Plasma Science and Technology 年份:2008
...
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