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[期刊论文] 作者：SongwenDeng,FengWang,ShunfuLiu,GangLi,LongSun,YuqiJin,
来源：ChineseOpticsLetters 年份：2013
Residual stress, which can be inevitably introduced during the optical films deposition process, must be controlled in many applications since the surface deformation is caused. The residual stress is traditionally controlled by adjusting t......
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