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[期刊论文] 作者:Wu Nanchun Xia Yiben Tan Shouh, 来源:中国稀土学报:英文版 年份:2006
Nanocrystalline diamond films were deposited on polished Si wafer surface with electron assisted hot filament chemical vapor deposition at 1 kPa gas pressure, t...
[期刊论文] 作者:Wu Nanchun Xia Yiben Tan Shouh, 来源:中国稀土学报:英文版 年份:2006
With electron assisted hot filament chemical vapor deposition technology, nanocrystalline diamond films were deposited on polished n-(100)Si wafer surface. The...
[期刊论文] 作者:Wu Nanchun,Xia Yiben,Tan Shouh, 来源:稀土学报(英文版) 年份:2004
With electron assisted hot filament chemical vapor deposition technology, nanocrystalline diamond films were deposited on polished n-(100)Si wafer surface. The...
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