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,Etch Damage Evaluation in Integrated Ferroelectric Capacitor Side Wall by Piezoresponse Force Micro
[期刊论文] 作者：WANG Long-Hai,DAI Ying,DENG Zhao,
来源：中国物理快报（英文版） 年份：2008
The etch damage in integrated ferroelectrie capacitors side wall fabricated by the typical integrated process (TIPFeCAP) and the innovated integrated process (I...
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