搜索筛选:
搜索耗时1.3937秒,为你在为你在102,285,761篇论文里面共找到 1 篇相符的论文内容
发布年度:
[会议论文] 作者：Tae-Kwang Eom,Windu Sari,Soo-Hyun Kim,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Bilayers of Ru(7nm)/WSixNy(8nm) prepared by sputtering were investigated as diffusion barriers between Cu and Si for direct-plateable Cu interconnects and their diffusion barrier performances were com...
相关搜索：
