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A CMOS compatible process for monolithic integration of high-aspect-ratio bulk silicon microstructur
[期刊论文] 作者：QIAN Liang,YANG ZhenChuan,YAN GuiZhen,,
来源：Science China(Information Sciences) 年份：2014
We report a CMOS compatible bulk micromachining method for the integration of high-aspectratio single crystal silicon MEMS(micro electromechanical systems)devic...
[期刊论文] 作者：YANG ZhenChuan,WEI YuMin,MAO Xu,YAN GuiZhen,,
来源：Science China(Technological Sciences) 年份：2013
A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices is presented,which takes advantage of the lag effect in silicon DRIE(dee...
[期刊论文] 作者：DING HaiTao,YANG ZhenChuan,WANG ZhanFei,KRAFT Michael,YAN GuiZhen,,
来源：Science China(Information Sciences) 年份：2013
This paper presents a MEMS gyroscope control system of using a high-order band-pass continuoustime sigma-delta modulator.Compared with a low-pass discrete-time...
[期刊论文] 作者：HE ChunHua,ZHAO QianCheng,LIU YuXian,YANG ZhenChuan,YAN GuiZhen,,
来源：Science China(Technological Sciences) 年份：2013
This paper presents a novel design method of force rebalance control for the sense mode of micromachined vibratory gyroscopes.Specific theoretical deductions ar...
[期刊论文] 作者：Kang Liu,Riguo Fang,Haibo Li,Weifeng Yang,Zhenchuan Miao,Jinhua Wen,Hongkui Deng,
来源：蛋白质与细胞 年份：2015
Dear Editor,For decades, the stem cell field has pursued the development of humanized mice to further enhance our understanding of human hematopoiesis, innate i...
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