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The even device fabricated by the deep etched binary optics technology for the exposure system of th
[期刊论文] 作者：Ping Xu (1), Yiling Sun (1),,
来源：中国科学：技术科学英文版 年份：2002
［1］Xu Ping, Tang Jiyue, Guo Lurong et al., Deep etch element of binary optics, Acta Optica Sinica, 1996, 16(12): 1796-1801.［2］Xu Ping, Tang Jiyue, Guo Lurong et al....
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