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Reduction of global warming gas emission during silicon nitride etching by using C3F6/O2 gas chemist
[会议论文] 作者：H. Lee,S. H. Cho,N.-E. Lee,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Global warming gas emission such as perfluorocarbon compounds (PFCs) has been an issue in the semiconductor and display industries due to their large global warming potentials (GWPS)....
Etching characteristics of SiO2 layer using amorphous carbon mask in dual-frequency capacitively cou
[会议论文] 作者：H. LEE,B. S. Kwon,N.-E. Lee,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
As critical dimension (CD) in the nano-scale semiconductor devices during the fabrication of Si integrated circuits continuously decrease,etch selectivity control during patterning of nano-scale struc...
Patterning of SnO2 / SnTe binary mask structure for extreme ultra-violet lithography using inductive
[会议论文] 作者：Lee,J. H. Lee,N.–E. Lee,S. J. Park,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Currently,extreme ultra-violet lithography (EUVL) is the major candidate of next generation lithography for below 25 nm technology node....
Patterning of SnO2 / SnTe binary mask structure for extreme ultra-violet lithography using inductive
[会议论文] 作者：Lee,J. H. Lee,N.–E. Lee,S. J. Park,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Currently,extreme ultra-violet lithography (EUVL) is the major candidate of next generation lithography for below 25 nm technology node....
Organic light-emitting devices with an n-type bis(ethylenedithio)-tetrathiafulvalene-doped 4,7-diphe
[会议论文] 作者：Lee,D. H. Kim,D. U. Lee,T. W. Kim,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Organic light-emitting devices (OLEDs) with an n-type bis(ethylenedithio)-tetrathiafulvalene (BEDT-TTF)-doped 4,7-diphenyl-1,10-phenanthroline (BPhen) electron transport layer (ETL) were fabricated to...
[会议论文] 作者：BongJu Lee,Y. C. Hong,S. J. Lee,D. H. Shin,Y. J. Kim,Y. U. Shin,H. S. Uhm,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
A pure steam-plasma torch generated by microwave energy and uses it for coal gasification in a compact and lightweight operating system....
[会议论文] 作者：Ching-Ting Lee,Hsin-Ying Lee,
来源：第五届届全国氧化锌学术会议 年份：2011
Zinc Oxide (ZnO)-based materials are widely ultized in applications of electronic devices,optoelectronic devices and sensors [1,2].Several methods have been...
[会议论文] 作者：Jong-Chul Lee,Won-Ho Lee,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
In this study,we conducted SF6 arc plasma simulations and breakdown performance prediction in high-voltage circuit breakers for understanding the complex physics and the probability of thermal and die...
[会议论文] 作者：Lee Byung-Oh,Lee Won-Bok,
来源：2011中国肉牛选育改良与产业发展国际研讨会 年份：2011
The Beef Traceability System (BTS) is a "Consumer Assurance Program" which minimizes consumers damage through tracing distribution channel of beef.In case of some problems on the hygiene or safety, th...
[会议论文] 作者：Lee,K. H. Choi,J. Y. Shin,D. K. Park,K. H. Noh,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Frequency and reverse time effects on asymmetric bipolar pulsed DC BCl3 etching of GaAs were investigated.Gas flow rate of BCl3 was fixed at 20 sccm and chamber pressure was at 75 mTorr....
[会议论文] 作者：H. Xu,H. M. Wen,
来源：第十届全国冲击动力学讨论会 年份：2011
A spherical cavity expansion model for concrete is first proposed by using an elastic-brittle-plastic material law with Hoek-Brown strength criterion....
[会议论文] 作者：H. T. Yang,H. L. Liu,Z. H. Cheng,
来源：第十四届全国磁学和磁性材料学术会议暨第二届全国磁热效应材料和磁制冷技术学术研讨会 年份：2011
@@ Magnetic nanoparticles (NPs) represent a critical link between current technology and the next generation of magnetic materials, because of their intriguing...
[会议论文] 作者：H. Butting,
来源：2011全国非常规水源利用技术研讨会 年份：2011
...
[会议论文] 作者：H. Sakurai,
来源：第六届北京亚原子物理国际暑期学校研讨会 年份：2011
...
Development of Room Temperature Processed High Quality TCO Thin Film Using the DC/RF Superimposed Ma
[会议论文] 作者：JunYoung Lee,YouJong Lee,YouJong Lee,MoonPyo Hong,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Recently,commercial demands about the room temperature processed Transparent Conducting Oxide (TCO) film for applying to various flexible electronics devices based on plastic substrate....
[会议论文] 作者：H. Woo,Terry H. H.Wen,
来源：国际计算/实验科学与工程学术会议(icces2011) 年份：2011
...
[会议论文] 作者：Lee,H. A. Yoo,D. G. Kim,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Pollutants emitted from the semiconductor manufacturing process can decrease the durability of vacuum pumps,and this is a growing concern in the semiconductor industry....
[会议论文] 作者：John Lee,
来源：2011中国国际矿业大会暨全球矿业高峰论坛 年份：2011
...
[会议论文] 作者：Dae-Sil Lee,
来源：The 3rd Asian Communications of Glycobiology and Glycotechno 年份：2011
...
[会议论文] 作者：Jooyoung Lee,
来源：the 3rd Asia Pacific Protein Association Conference in ConJu 年份：2011
...
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