O2-Plasma相关论文
Effect of annealing and plasma oxidation on the resistivity of phosphorous- doped poly crystalline s
The effects of annealing and plasma oxidation on phosphorus-doped poly-silicon layers were studied in this work.Plasma o......
红外吸收谱分析表明,聚硅烷Polymethyl phenethyl silane(PMPES)在氧等离子体处理后转变成PSiO膜,PSiO中的x在1.5-2.0之间,其高频C-V特性曲线的平带电压力正,大小与氧等离子处理条件和PMPES厚度......
氧等离子体处理高阻P型〈100〉硅片上的聚硅烷涂层制备SiO2/Si结构。其MOS结构平带电压随氧等离子体处理时间、反应室气压、射频功......