RF-PCVD相关论文
Effect of Magnetic Field on the Deposition of Transparent Diamond-Like Carbon ( DLC ) Films by RF-PC
In order to deposit transparent and hard DLC films, magnetic field was introduced to enhance the plasma density of radio......
以C2H2为反应气体，Ar为等离子体工作气体和冷却气体，采用高频等离子体气相沉积法制备一种新颖的纳米碳粒，以TEM、HRTEM、BET、XRD、FT......
采用磁约束增强射频辉光放电等离子体辅助化学气相沉积法（RF—PCVD）低温沉积出无色透明的类金刚石保护膜（DLC），主要研究了炉压P0、射频......
