Highly oriented multiple boron nanowire nanojunctions with unilateral feather- like morphology were first successfully p......

Rf sputtering in an Ar discharge of a SiC target has been used to deposit β-SiCfilms on Si-(111) substrates. XRD and in......

本文论述了薄膜磁敏元件对基片的要求，依此要求选择硅和高密度铁氧体为基片，上部制备SiO2作绝缘膜。重点讨论了用射频溅射法制备SiO2......

本文对离子束溅射生成气敏膜作了研究。与烧结陶瓷气敏传感器比较，溅射生成气敏膜对乙醇气体具有灵敏度高，长期稳定，对其它气体选择性......

微细加工技术建立在电子、离子和光子的粒子能量(物理)和引起的微化学反应(化学)的基础上。固有的粒子微小尺寸给它带来了惊人的精......