nc-SiOx:H相关论文
,Influences of hydrogen dilution on microstructure and optical absorption characteristics of nc-SiO:
By using the plasma enhanced chemical vapor deposition (PECVD) technique, amorphous silicon oxide films con-taining nano......
Amorphous silicon oxide containing nanocrystalline silicon grain(nc-SiO_x:H) films are prepared by a plasmaenhanced chem......