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A new net-shape cathode sputtering target which has a simple structure and a high sputtering was put forward. The multip......
设计了一种网状阴极溅射靶,它是由多个空心阴极并列交叉组合而成.结构简单,溅射率高.将其用于双层辉光离子渗钽中,在钛合金(Ti-6Al......
A new net-shape cathode sputtering target which has a simple structure and a high sputtering was put forward. The multip......