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5. Spatially Resolved F, CF, CF2 Actinometry in M-ICP CF4 plasma

Spatially Resolved F, CF, CF2 Actinometry in M-ICP CF4 plasma

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：yanfengim

【摘 要】

：

As the plasma etching chamber becomes larger,information on spatial distribution of chemically reactive species in plasma is necessary.Spectroscopic diagnostic method can be one of indirect methods fo

【作 者】

：

WooHyun Lee Jae-Chul Jung DongHyun Kim 

【机 构】

：

Plasma Laboratory, Inter-University Semiconductor Research Center, Department of EECS, Seoul Nationa

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

Actinometry radical concenteration M-ICP 

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As the plasma etching chamber becomes larger,information on spatial distribution of chemically reactive species in plasma is necessary.Spectroscopic diagnostic method can be one of indirect methods for monitoring the density of chemically reactive species densities in plasmas.

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