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Laser-induced Damage Properties of Diamond-like Carbon Films Prepared by Unbalanced Magnetron Sputte
【机 构】
:
School of Opto-electronic Engineering, Xi'an Technological University, Xi'an, China
【出 处】
:
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
:
2011年3期
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