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5. Plasma-enhanced atomic layer deposition of Al2O3/TiO2 moisture permeation barriers on polymer substr

Plasma-enhanced atomic layer deposition of Al2O3/TiO2 moisture permeation barriers on polymer substr

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：wuyu9603

【摘 要】

：

Flexible plastic substrates are widely used nowadays in many industries including automotive applications,electrical appliances,recording media,and packaging for food and other consumer goods.

【作 者】

：

Dong Suk Han Woong Sun Kim Dae Yong Moon Jae Hyung Park Sae Young Shin 

【机 构】

：

Division of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

Atomic layer deposition Thin films Passivation Aluminum Oxide Titanium Oxide 

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Flexible plastic substrates are widely used nowadays in many industries including automotive applications,electrical appliances,recording media,and packaging for food and other consumer goods.

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