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  5. Dual-power electrodes atmospheric pressure argon plasma jet: effect of driving frequency on discharg

Dual-power electrodes atmospheric pressure argon plasma jet: effect of driving frequency on discharg

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：mars22
【摘 要】
：
In this paper,an atmospheric pressure argon plasma jet generated by sinusoidal power input of moderate frequency (kHz range) and designed with dual-power electrodes is characterized and studied.
【作 者】
：
Muyang Qian Qianqian Fan Chunsheng Ren Dezhen Wang Qiuyue Nie 
【机 构】
：
School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023,Chin
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
【关键词】
：
Plasma Source Plasma diagnostics Plasma properties 
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In this paper,an atmospheric pressure argon plasma jet generated by sinusoidal power input of moderate frequency (kHz range) and designed with dual-power electrodes is characterized and studied.
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