Nanomechanical Resonators Fabricated by Simple Top-down Technology

来源 :The 6th International Conference on Nanoscience and Technolo | 被引量 : 0次 | 上传用户：ewqvcx

【摘要】

：

Nanoelectromechanical systems(NEMS),particularly nanomechanical resonators vibrating at very high frequencies(VHF),are being widely investigated for applications including resonant sensors,oscillators

【作者】

：

Yang Liu Yangyang Qi Mingliang Zhang Xiaodong Wang

【机构】

：

Engineering Research Center for Semiconductor Integrated Technology,Institute of Semiconductors,Chin

【出处】

：

The 6th International Conference on Nanoscience and Technolo

【发表日期】

：

2015年5期

【关键词】

：

NEMS nanomechanical resonators silicon nanowires top-down technology

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Nanomechanical Resonators Fabricated by Simple Top-down Technology

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